Many applications for plasma in electronics: 

  • Plasma cleaning of circuit boards prior to metallisation and prior to soldering or bonding.
  • Removing of oxide layers prior to soldering or bonding in order to optimize electrical contacts.
  • Etching of circuit paths.
  • Ashing of foto resists after finishing fotolithographic processes.
  • etching of silicon and silicon oxides
  • Etching of microscale structures such as grooves and channels in semiconductors
  • Protective coatings on electronic devices by plasma polymerisation. These coatings protect cause waterproofness and protect against enviromental effects.
micro electronics
A plurality of process in microelectronics take profit from the benefits of plasma technology